Nanoimprint lithography

Fabrication of size controllable SU-8 nanochannels using nanoimprint lithography and low-pressure thermal bonding methods

We present a replication process, named reversal soft ultraviolet (UV) nanoimprint, to fabricate a high-aspect-ratio flexible subwavelength grating (SWG) on a polyurethane acrylate (PUA). This nanopatterning technique consists of casting, reversal UV

Photonic crystal slabs integrated into organic light-emitting diodes (OLEDs) allow for the extraction of waveguide modes and thus an increase in OLED efficiency. We fabricated linear Bragg gratings with a 460-nm period on flexible polycarbonate subst