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  1. Non-piece-wise error compensation for grating displacement measurement system with absolute zero mark

  2. A method for compensating the measuring error of the grating displacement measurement system with absolute zero mark is presented. It divides the full scale range into piece-wise subsections and compares the maximum variation of the measuring errors
  3. 所属分类:其它

    • 发布日期:2021-02-10
    • 文件大小:153kb
    • 提供者:weixin_38741101