The Generic Equipment Model (GEM) Standard is
published by Semiconductor Equipment and Materials
International, Inc. (SEMI), and is identified as SEMI
Standard E30.
SEMI E30-1103 GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF MANUFACTURING EQUIPMENT (GEM)
SEMI E30.1-0200 INSPECTION AND REVIEW SPECIFIC EQUIPMENT MODEL (ISEM)
SEMI E30.5-0302 SPECIFICATION FOR METROLOGY SPECIFIC EQUIPMENT MODEL
SEMI E30-1103 GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF MANUFACTURING EQUIPMENT (GEM)
SEMI E30.1-0200 INSPECTION AND REVIEW SPECIFIC EQUIPMENT MODEL (ISEM)
SEMI E30.5-0302 SPECIFICATION FOR METROLOGY SPECIFIC EQUIPMENT MODEL
