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  1. Study on a MEMS silicon-based non-silicon mirror for an optical switch

  2. A micro-electro-mechanical system (MEMS) silicon-based non-silicon mirror for a 2D optical switch is designed, fabricated and measured. The result shows that the mirror has good reflective performance. And driven by static electricity, it can rotate
  3. 所属分类:其它

    • 发布日期:2021-02-13
    • 文件大小:323kb
    • 提供者:weixin_38654220