说明:In semiconductor and display manufacturing industry more complex system with more compact
equipments is being employed. Keeping up with the system and monitoring the process has
become more important in terms of product yield and quality and at the <cycy888888> 上传 | 大小:5mb
说明:Attaches to Asyst SMIF-Pods and other wafer carriers, and travels through the fab communicating lot identification and process information to the operator, process tool, and host. <cycy888888> 上传 | 大小:1mb