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文件名称: 罗克韦尔 多晶硅生产自动化解决方案.pdf
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 详细说明:罗克韦尔 多晶硅生产自动化解决方案pdf,罗克韦尔 多晶硅生产自动化解决方案Solution Encoders are used for position feedback and Rockwell Automation offers solutions to help monitor and tachometers are used for monitoring the speed of the control the wire saws used to slice the silicon ingots into cutting wire as it is fed through the wire guides. the wafers. Central to the solution for wafer slicing equipment is wire guides are usually driven by dedicated motors and the rockwell Automation Integrated Architecture the bearing temperature is monitored continuously Integrated Architecture brings together a powerful The wire is routed through various pulleys and multi-disciplined control engine, seamless networking, a tensioning arms which help keep the wire tension and scalable visualization platform and the information movement smooth and steady reducing the risk of wire technologies needed to help you lower your Total Cost to leakage Design Develop and deliver m a machine A local slurry station or connection to a centralized Unlike conventional control architectures, the Integrated slurry delivery system is usually offered as an option Architecture provides fully integrated, scalable solutions Slurry and mixing pumps are controlled with variable using a single control platform and a single development speed drives to adjust the flow rate of various additives environment it allows machine builders to build such as slurry, water, glycol or oil. The slurry also acts as standardized code with improved access to production and a cooling agent as the silicon block is sawn the flow diagnostic information. This helps machine builders shorten and temperature of the slurry is monitored carefully via design cycles and increase their focus on innovations that sensors at multiple locations. Air which is also used for ead to a competitive advantage cooling is exhausted through an electrostatic cleaning process before exiting to a central exhaust system The Allen-Bradley CompactLogix Programmable Automation Controller(PAC)or ControlLogix PAC can help An industrial computer running rockwell Software control the wire saw by taking advantage of the powerful Factory Talk Historian and Factory Talk view can be used process control capabilities inherent in the logix engine for data collection and real-time visualization of the Kinetix integrated motion control capabilities and the technological process data. In some cases a single premier integration of networked drives can also be used computer acting as a cell controller can monitor multiple wire saws as they process the silicon blocks The wafer slicing machine is equipped with a number of This allows analysis of data from one machine to the sensors for the optimization and control of the sawing next from a single location. Production reports with process. Some machines are equipped with simple specific process data can be generated. OEE pushbuttons and pilot lights for the operators to utilize calculations and reports can also be generated using while others use a panelview plus m local operator interface dditional modules included in the Factory Talk terminal. the panel view plus hmi can display a broader Integrated Production and Performance Suite (e. g range of information regarding the machine state, FactoryTalk Vantage point and FactoryTalk Metrics) diagnostic messages and troubleshooting guidance From a maintenance screen, machine parameters like table feed Advanced process control capabilities will become rate slurry flow rate slurry temperature wire speed and increasingly important as the wafer thickness is tension can be programmed reduced and thinner wires are used to cut the silicon ingots. APC offerings from rockwell automation can Servo motors are used to control the table position and feed help OEMs tighten control variations and optimize the rate of the silicon blocks as they enter the wire web. Servo cutting process. motors are also used to unwind and wind the cutting wire and maintain tension on the wire used during the cutting process. Typical Architecture Wafer Slicing Equipment Plant Network Factory Talk View Stratix 8000T Switc Panelview Plus HM Trending, Recipe EtherNeulPTM EtherNetiP Connectivity to the Factory Talk Production and controlLogix Controler EtherNetIP Performance Suite Flex lo therNet/IP SERCOS Programmable Automation Controler Process Control Discrete Control Connectivity to Motion Control Remote I/Q Platforms Drive Control (Analog/Digital/Specialty) SERCOS Kinetix EtherNetIP Servo Drives oeF色x Spool Spool Vertical Take-Up Output I Poo Rocker Spool Water (Unwind) Spindle(s) lable i Adust Adiust Slury Pump Wire Feed (Unwind) (Wind) Pump ctivity to Servo Connectivity to Steppe Connectivit o with Integrated Motion Motors ove EtherNet/IP Inteligent Drives Rockwell Automation solutions deliver improved production capabilities and reduced total cost of ownership by providing unparalleled functionality, flexibility and scalability. Machine builders can respond more quickly to customer or market demands, reduce maintenance costs and downtime and easily gain access to actionable plant and production information for improved management and decision-making Allen-Bradley, Rockwell Software, Integrated Architecture, CompactLogix, ControlLogix, Kinetix, PowerFlex, POINT I/O, Flex, Factory Talk, Stratix 8000, and Total Cost to Design, Develop, and deliver are trademarks of Rockwell Automation EtherNet/IP is a trademark of odva Power, Control and Information Solutions Headquarters Americas: Rockwell Automation, 1201 South Second Street, Milwaukee, W1 532C4 USA, Tel:(1)414.382, 2000, Fax: (1)414.382 4441 Europe/Middle East/Africa: Rockwell Automation, Vorstlaan/Boulevard du Souverain 36, 1170 Brussels, Belgium, Tel:(32)2663 0600, Fax:(32)2663 0640 Asia Pacific: Rackwell Automation, Level 14, Core F, Cyberport 3, 100 Cyberport Road, Hong Kong, Tel:(852)2887 4788, Fax: ( 852)2508 1846 Publication OEM-AP061A-EN-P- August 2009 Copyright 2009 Rockwell Automation, Inc. All Rights Reserved. Printed in USA
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