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文件名称: sprocess_ug.pdf
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  文件大小: 8mb
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  上传时间: 2019-10-06
  提 供 者: simpl*****
 详细说明：Swb maunual ， TCAD 仿真软件应用手册， sentaurus, sprocessContents About This Guide XXX Audi XXXII Related Publications .,....,.XXX1 Typographic Conventions ....,,,,,..,.......XXX11 Customer Support..... Accessing SolvNet XXXII Contacting Synopsys Support Contacting Your Local TCAD Support Team Directly XXXIV Acknowledgments XXXIV Chapter 1 Getting Started Overview Setting up the environment Starting sentaurus process Starting different versions of sentaurus process 11233 Using a Command file Chapter 2 Working With the simulator Overview..... Interactive visualization 香垂 Interface to sentaurus visual 6 Setting up the Interface Loading command fi Inserting Breakpoints in the Flow Deleting Breakpoints in the Flow Symbols and Color Indicators 9 Updating the structure 10 Controlling Interface to Sentaurus Visual With graphics Command .10 Command-Line options Interactive mode 12 Fast mode 13 Terminating Execution.........,. Environment variables ·· ..,,,,,,,14 File Types∴ 14 Syntax for Creating Command Files ······· Tcl Input. 17 Sentaurus M Process User guide Ill M-2016.12 Content Specifying materials aliases 19 Default simulator Settings: SPROCESS models file 20 Compatibility With Previous releases 21 Parameter databas 22 Parameter Inheritance.,.,…… .,24 Like materials: Material Parameter Inheritance 24 Interpolation Between Like Materials Interface param 25 Alloy materials and pa ter interpolati 25 Using parameter Interpolation 26 Lation Function Type 26 ation at interfaces 29 Defining Alloy materials 29 Regionwise Parameters and region Name-Handlin ....29 Parameter Database Browser: Viewing the defaults ..,31 Starting the Parameter Database browser................. 32 PDB Browser functions 33 Viewing parameter information 34 PDB Browser Preferences Viewing parameters Stored in TDR Files 36 Understanding Coordinate Systems .....,,,.37 Wafer Coordinate System ,,,,,,37 Simulation Coordinate system ...37 Creating and Loading Structures and Data ..........∴..39 Defining the structure: The line and region command 39 Creating the Structure and Initializing data..∴.∴,,….40 Defining the Crvstal orientation 41 Automatic Dimension Control 42 Interpolating Field Data From an External Structure File Using the load Command. 43 Loading 1D Profiles: The profile Command 44 Saving structures..... .···::············· 44 a structure for restarting simulatic Saving a structure for device simulation Converting silicon material to sige material 48 Saving doping Information in Sic and gan for Device Simulations .49 Saving ID TDR Fles From 2D and 3D Simulations, and 2D TDR Files From 3D.4g Saving lD Profiles for Inspect Simulations 49 The select Command(More lD Saving Options) 50 The datexcodes. txt File 50 Sentaurus M Process User guide M-2016.12 Contents Chapter 3 lon Implantation 53 Overview ..53 Working With Ion Implantation 54 Specifying Analytic or Monte Carlo Implantation 54 Specifying Implantation Parameters 54 Selecting mode Simulating Multirotation Implantations 57 Simulating Energy Contamination Implantations Specifying Adaptive meshing during Implantation 8 Coordinate system for Implantation Tilt and rotation angles 5 2D Coordinate sy 61 Analytic Implantation 62 Primary distribution functions 63 Dual-Pearson Distribution: dualpearson 64 Gaussian Distribution: gaussian 65 Pearson Distribution: pearson :···::··· ....,66 Pearson Distribution With Linear Exponential Tail: pearson.s 67 Point-Response Distribution: point response 68 Screening(Cap)Layer-Dependent Moments 68 Lateral straggle 69 Depth-Dependent Lateral Straggle: Sentaurus Process Formulation..... 70 Depth-Dependent Lateral Straggle: Dios Formulation...........70 Depth-Dependent Lateral Straggle: Taurus Formulation 70 Analytic Damage: Hobler model .,,,,,,71 Datasets......,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, ··· Implantation tables 74 Default table 74 Dios tables 垂· 75 Tasch tables .,,,,,,,,,,,,76 Taurus tables 76 TSUPREM-4 Native Implantation tables Implantation Table Formats 79 Single-Pearson Table Format: .sp 79 SUPREM-III Table Format: . 3 79 Dios table format: tab 80 Damage Table format. dam 82 Taurus table format:
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